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SFB 591 » Projekte » B5
 

Title

Thin film deposition in pulsed plasmas

Project manager

Prof. Dr. Jörg Winter
Institut für Experimentalphysik II
Anwendungsorientierte Plasmaphysik
Ruhr-Universität Bochum

PD Dr. Johannes Berndt
Institut für Experimentalphysik II
Anwendungsorientierte Plasmaphysik
Ruhr-Universität Bochum

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  Summary
  Goals

The complex plasma surface reciprocal effect of reactive plasmas is characterized by a multiplicity of ion sorts and neutral radicals of different energy distribution. It determines on one hand the plasma-induced separation of thin layers on macroscopic scale and on the other hand the growth of nano-particles in plasmas on microscopic scales. For the processes, which specify the separating mechanisms of thin layers, two areas of discharge are equally important, the bulk plasma, as well as the boundry layer formed just in front of the substrate. While the bulk plasma steers the plasma-chemical processes over its electron density and electron energy distribution function and thus serves as source area of the different species sorts (radicals, ions and nano-particles) with usually thermal energies of the neutral particles, the plasma outer zone gives the ion component by acceleration a non-equilibrium-character. It is well-known that it can come, during the surface reciprocal effect, to pronounced synergistic effects between species of high-energy and reactive cold radicals, which influence both the growth rate of the plasma-separated layers and their characteristics considerably.

The goal of this subproject is the investigation of synergy between ions of high-energy and cold reactive neutral particles with the formation of plasma-separated layers. As model system essentially hydrogenbased carbon layers are used due to their technological relevance as well as their "relatedness" to carbon-containing micro particles.

 
 
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