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SFB 591 » Projekte » B4
 

Title

Sheath dynamics in pulsed plasmas: spatially and temporally resolved measurements and modelling

Project manager

Dr. Albrecht Brockhaus
Forschungszentrum für
Mikrostrukturtechnik
Bergische Universität Wuppertal

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  Summary
  Goals

It is the goal of this subproject to win a better understanding of the transportation processes by experimental and theoretical investigations within the wall range of a plasma. A high frequency discharge with a substrate holder, whose voltage can be modulated suitably serves as a model system. In different work procedures both electricalpositive and electronegative plasmas are to be examined, as well as layerforming Argon/Oxygen/Siloxan-plasmas, with which quartz-similar layers can be separated on as a substrate. In order for a better understanding, of the transportation procedures in front of the wall and/or the substrate, it is planned, to affect and to measure, with suitable diagnostic time-dissolved methods, the flux of positive and negative oxygen ions. Parallel to it the plasma dynamics is to be theoretically enlightened by the development of fluid-dynamic and kinetic models.

The goal of this subtask is to attain a better understanding of the boundry zone dynamics in pulsed plasmas. In addition parallel investigations of both, experimental (fmt, Bergische University of Wuppertal) and theoretical (tp1, Ruhr University Bochum) nature are to be accomplished.

Within the theoretical works earlier beginnings are to be generalized according to the current problem. Here one thinks of working on the wall- (and/or substrate-) geometry, the pulse form and - last but not least - the consideration of different positive and negative ion sorts.

The methods are being dealt with former works in mind. Here the separate two-scale-analysis of the layer and the pre layer plays a central role. In the interest of the physical understanding i is planned to work as far as possible analytically on a hydrodynamic basis. The substantial inhomogeneity and instationarity of the layer-relaxation however force us to examine individual aspects kineticaly. Because of the difficult coupling with the self consistency problem we predominantly have to work numerically.

According to the work programme and the schedule plan one first emphasizes on extending the analytic model of the layer relaxation regarding the geometry and pulse form. In a second phase different positive and negative ion components are to be considered. Parallel to it, the kinetic analysis of the pre-layer relaxation can be prepared, which is intended for the third phase.

 
 
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